Aufsatz(elektronisch)#1Impact of Annealing on Electric and Elastic Properties of 10-Nm Hf0.5zr0.5o2 Films Prepared on Si by SputteringIn: MEE-D-22-00040Bolotov, Leonid; Migita, Shinji; Fujio, Ryouta; Ishimaru, Manabu; Hatayama, Shogo; Uchida, NoriyukiBolotov, Leonid; Migita, Shinji; Fujio, Ryouta; Ishimaru, Manabu; Hatayama, Shogo; Uchida, NoriyukiBestellen über Zugriff(Open Access)Bestellen über Subito