Suchergebnisse

The development of advanced piezoelectric α‐quartz microelectromechanical system (MEMS) for sensing and precise frequency control applications requires the nanostructuration and on‐chip integration of this material on silicon material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost, and the scalability of quartz microdevices. Here, chemical solution deposition, soft‐nanoimprint lithography, and top‐down microfabrication processes are combined to develop the first nanostructured epitaxial (100)α‐quartz/(100)Si piezoelectric cantilevers. The coherent Si/quartz interface and film thinness combined with a controlled nanostructuration on silicon–insulator–silicon technology substrates provide high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric α‐quartz‐based MEMS on silicon can be engineered at low cost by combining soft‐chemistry and top‐down lithographic techniques. ; This project had received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (project SENSiSOFT No.803004). L.P. acknowledges the ATIP–Avenir program for financial support. The authors thank C. André for providing the transfected HT1080 cell line and C. Cazevielle (MRI‐COMET, Montpellier) for assistance with biological SEM images. The authors thank D. Montero for performing the FEG–SEM images and chemical analysis. The FEG–SEM instrumentation was facilitated by the Institut des Matériaux de Paris Centre (Grant No. IMPC FR2482) and was funded by Sorbonne Université, CNRS and by the C'Nano projects of the Région Ile‐de‐France. The authors thank Frederic Pichot, David Bourrier, and Guilhem Larrieu for the expertise and advice during the cantilever lithographic processes. The authors also thank Wioletta Trzpil, Frank Augereau, and Eric Rosenkrantz for the advice during vibrometry measurements. A.G and M.G acknowledge funding from the Spanish Ministerio de Ciencia e Innovacion through the severo Ochoa program (CEX2019‐000917‐S). ; Peer reviewed