Suchergebnisse

This paper describes the development and application of an autonomous register and measurement system (ARMS), and the application of microelectromechanical systems (MEMS) accelerometers to the assessment of blast threat to armored vehicle crews. Taking measurements with reference to an explosion is one of the principal issues in the protection of crews of special vehicles. The proposed ARMS reduces research costs and contributes to the development of an autonomous, wireless test stand, applicable in various research areas and industry. The ARMS performs data acquisition with simultaneous measurement in multiple channels. The maximum sampling rate is 100 kHz and the sensor range is ±500 g. This solution is an alternative to cable systems, which have a high energy demand. The functionality of the developed autonomous measuring system is demonstrated experimentally. The paper concludes with a field study of the proposed system and the application of MEMS accelerometers via a mine blast test of a military vehicle at level 4 of STANAG 4569.

This paper describes the development and application of an autonomous register and measurement system (ARMS), and the application of microelectromechanical systems (MEMS) accelerometers to the assessment of blast threat to armored vehicle crews. Taking measurements with reference to an explosion is one of the principal issues in the protection of crews of special vehicles. The proposed ARMS reduces research costs and contributes to the development of an autonomous, wireless test stand, applicable in various research areas and industry. The ARMS performs data acquisition with simultaneous measurement in multiple channels. The maximum sampling rate is 100 kHz and the sensor range is ±500 g. This solution is an alternative to cable systems, which have a high energy demand. The functionality of the developed autonomous measuring system is demonstrated experimentally. The paper concludes with a field study of the proposed system and the application of MEMS accelerometers via a mine blast test of a military vehicle at level 4 of STANAG 4569.

The development of advanced piezoelectric α‐quartz microelectromechanical system (MEMS) for sensing and precise frequency control applications requires the nanostructuration and on‐chip integration of this material on silicon material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost, and the scalability of quartz microdevices. Here, chemical solution deposition, soft‐nanoimprint lithography, and top‐down microfabrication processes are combined to develop the first nanostructured epitaxial (100)α‐quartz/(100)Si piezoelectric cantilevers. The coherent Si/quartz interface and film thinness combined with a controlled nanostructuration on silicon–insulator–silicon technology substrates provide high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric α‐quartz‐based MEMS on silicon can be engineered at low cost by combining soft‐chemistry and top‐down lithographic techniques. ; This project had received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (project SENSiSOFT No.803004). L.P. acknowledges the ATIP–Avenir program for financial support. The authors thank C. André for providing the transfected HT1080 cell line and C. Cazevielle (MRI‐COMET, Montpellier) for assistance with biological SEM images. The authors thank D. Montero for performing the FEG–SEM images and chemical analysis. The FEG–SEM instrumentation was facilitated by the Institut des Matériaux de Paris Centre (Grant No. IMPC FR2482) and was funded by Sorbonne Université, CNRS and by the C'Nano projects of the Région Ile‐de‐France. The authors thank Frederic Pichot, David Bourrier, and Guilhem Larrieu for the expertise and advice during the cantilever lithographic processes. The authors also thank Wioletta Trzpil, Frank Augereau, and Eric Rosenkrantz for the advice during vibrometry measurements. A.G and M.G acknowledge funding from the Spanish Ministerio de Ciencia e Innovacion through the severo Ochoa program (CEX2019‐000917‐S). ; Peer reviewed

This thesis presents a novel rotary-wing micro-electro-mechanical systems (MEMS) robot design. Two MEMS wing designs were designed, fabricated and tested including one that possesses features conducive to insect level aerodynamics. Two methods for fabricating an angled wing were also attempted with photoresist and CrystalBond™ to create an angle of attack. One particular design consisted of the wing designs mounted on a gear which are driven by MEMS actuators. MEMS comb drive actuators were analyzed, simulated and tested as a feasible drive system. The comb drive resonators were also designed orthogonally which successfully rotated a gear without wings. With wings attached to the gear, orthogonal MEMS thermal actuators demonstrated wing rotation with limited success. Multi-disciplinary theoretical expressions were formulated to account for necessary mechanical force, allowable mass for lift, and electrical power requirements. The robot design did not achieve flight, but the small pieces presented in this research with minor modifications are promising for a potential complete robot design under 1 cm2 wingspan. The complete robot design would work best in a symmetrical quad-rotor configuration for simpler maneuverability and control. The military's method to gather surveillance, reconnaissance and intelligence could be transformed given a MEMS rotary-wing robot's diminutive size and multi-role capabilities.

Micro-Electro-Mechanical Systems (MEMS) are becoming an integral part of our lives through a wide range of applications, including MEMS accelerators for air bag deployment in vehicles, micromirrors in projection devices, and various sensors for chemical/biological applications. MEMS are a key aspect of ever-increasing significance in a myriad of commercial and military applications. Because of this importance, this thesis utilizes MEMS devices that can deploy and retract an antenna suitably sized for placement on an insect or microrobot for communication purposes. A target monopole antenna with a length of 1 mm was used as a test metric. From this requirement, several MEMS designs using scratch drives and thermal actuators as the basis for powering the motor were developed. Some of the fabricated and tested designs included a gear with side flaps that flip up perpendicular to the substrate; gears that push an antenna beam off the edge of the substrate; and an antenna beam that is moved upwards such that it stands perpendicular to the substrate. These designs had the highest likelihood of success. Other designs included an array of micro gears and guiding beams, a large wheel powered by scratch drives, and a gear with the pawl requiring assembly. For these designs to be successful, several basic modifications would be necessary. The antenna beam that moves into a position perpendicular to the substrate was successfully self-assembled.

This thesis studies selective etching techniques for the development of AlxGa1-xAs micro-opto-electro-mechanical systems (MOEMS). New MEMS technology based on materials such as AlxGa1-xAs enables the development of micro-systems with embedded active micro-optical devices. Tunable micro-lasers and optical switching based on MOEMS technology will improve future wavelength division multiplexing (WDM) systems. WDM vastly increases the speed of military communications and sensor data processing. From my designs, structures are prepared by molecular beam epitaxy. I design a mask set for studies of crystal plane selectivity. I perform a series of experiments on the selective removal of GaAs and AlAs. I convert AlAs and Al0.98Ga0.02As layers within the test structures to AlOx and Al0.98Ga0.02Ox and perform selective etching experiments on these sacrificial oxide layers. The etchants and materials studied showed high selectivity for removal of all materials studied. Results suggest that any of these material layers are useful as sacrificial layers for general MOEMS technology. I design, fabricate, and characterize prototype III-V MOEMS. Using AlOx sacrificial layers, I investigate a new technique for transplanting microcavity light-emitting devices. I successfully transplant arrays of light-emitting diodes. Finally, I discuss ideas on how this work forms the basis for nano-electro-mechanical systems (NEMS) fabrication in III-V materials.

Ziele, Ansatz, Kriterien und Vorgehensweise in der ex-ante Evaluation -- Zusammenfassung der zentralen Aussagen der Sekundäranalyse im Rahmen der Technology and Market Forecast Studies -- Ergebnisse der quantitativen Erhebung für die ex-ante Evaluation -- Ergebnisse der qualitativen Erhebung für die ex-ante Evaluation -- Potenziale einer künftigen Entwicklung der MST in Deutschland -- Chancen und Herausforderungen für die MST der Zukunft -- Innovationsbarrieren auf dem Weg zu erfolgreichen Zukunftsfeldern