Fabrication of Monolithic Bridge Structures by Vacuum-Assisted Capillary-Force Lithography

Abstract

Bridging the gap: Vacuum-assisted capillary force lithography (CFL) allows the fabrication of monolithic, suspended bridge structures (see picture) by exploiting partial curing kinetics and vacuum-assisted hydraulic filling. A small portion of the base microstructure (<4 µm) is molded to create a bridge structure by simply applying a nanoscale mold with the impression of channels, meshes, or circles. ; This work was supported by the Korea Science and Engineering Foundation (KOSEF) grant funded by the Korean government (MOST) (R01-2007-000-20675-0), the King Abdullah University of Science and Technology (KAUST) program (No. KUK-F1-037-02), and the Korea Research Foundation Grant funded by the Korean Government (MOEHRD) (Grant KRF-J03000). This work was supported in part by the Center for Nanoscale Mechatronics & Manufacturing (Grant 08K1401-00210) and the Grant-in-Aid for Strategy Technology Development Programs from the Korean Ministry of Knowledge Economy (No.10030046).