Fabrication and characterization of large-area suspended MoSe2 crystals down to the monolayer

Abstract

Many layered materials, such as graphene and transition metal dichalcogenides, can be exfoliated down to atomic or molecular monolayers. These materials exhibit exciting material properties that can be exploited for several promising device concepts. Thinner materials lead to an increased surface-to-volume ratio, with mono- and bi-layers being basically pure surfaces. Thin crystals containing more than two layers also often behave as an all-surface material, depending on the physical property of interest. As a result, flakes of layered materials are typically highly sensitive to their environment, which is undesirable for a broad range of studies and potential devices. Material systems based on suspended flakes overcome this issue, yet often require complex fabrication procedures. Here, we demonstrate the relatively straightforward fabrication of exfoliated MoSe flakes down to the monolayer, suspended over unprecedentedly large holes with a diameter of 15 µm. We describe our fabrication methods in detail, present characterization measurements of the fabricated structures, and, finally, exploit these suspended flakes for accurate optical absorption measurements. ; The authors would like to thank Emerson Coy (CNBM-AMU) for sharing the HR-TEM images. S V and D S R acknowledge the support of the Spanish Ministry of Economy through FPI-SO 2018 and FPI-SO 2019, respectively. ICN2 was supported by the Severo Ochoa program from Spanish MINECO (Grant No. SEV-2017-0706). K J T acknowledges funding from the European Union's Horizon 2020 research and innovation program under Grant Agreement No. 804349 (ERC StG CUHL), RyC Fellowship No. RYC-2017-22330, and IAE Project PID2019-111673GB-I00. A E S, E C A, M S and C M S T acknowledge support of the Spanish MICINN Project SIP (PGC2018-101743-B-I00).